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The "14 nanometer process" refers to a marketing term for the MOSFET technology node that is the successor to the "22 nm" (or "20 nm") node. The "14 nm" was so named by the International Technology Roadmap for Semiconductors (ITRS).
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May 25, 2023 · The 14 nanometer (14 nm) lithography process is a semiconductor manufacturing process node serving as shrink from the 22 nm process. The term "14 nm" is simply a commercial name for a generation of a certain size and its technology, as opposed to gate length or half pitch.
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In the 14 nm, 2 major technologies have been introduced to the 193 nm immersion photolithography, i.e., the source-mask co-optimization (SMO) and the negative tone developing (NTD).
