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Feb 22, 2021 · PDF | Thin films: definition, deposition techniques, and applications A thin film is a layer or layers (a stack of thin films is called a multilayer) of... | Find, read and cite all...
- 1.1. Why Thin Films?
- 1.2. Thin Film Growth Process
- 1.2.2. Solubility Relaxation
- 1.4.1.1. Autocatalytic Reduction/ Electroless Plating
- 1.5. Thick Film Deposition Techniques
- 1.5.1. Liquid-Phase Epitaxy (LPE)
- 1.5.2. Screen Printing
- 1.6.3. Structural Analysis
- 1.6.4. Composition Analysis
A solid material is said to be in thin film form when it is built up, as a thin layer on a solid support, called substrate, ab initio by controlled condensation of the individual atomic, molecular, or ionic species, either directly by a physical process, or via a chemical and/or electrochemical reaction. Since individual atomic, molecular, or ionic...
Any thin film deposition process involves three main steps: (1) produc tion of the appropriate atomic, molecular, or ionic species, (2) their trans port to the substrate through a medium, and (3) condensation on the substrate, either directly or via a chemical and/or electrochemical reaction, to form a solid deposit. Formation of a thin film takes ...
Another consequence of the thin film growth process is the phenomenon of solubility relaxation. The atomistic process of growth during codeposition allows doping and alloying of films. Since thin films are formed from individual atomic, molecular, or ionic species which have no solubility restrictions in the vapor phase, the solubility conditions b...
This technique is applicable for deposition of metal and metal-alloy films. In contrast to electrodeposition (Section 1.4.2.1) where the metal ions are converted to the corresponding elemental form (reduction) by taking electrons from an external source of current, in electroless plating a chemical reducing agent is used to supply the electrons for...
Although thick films are not the subject matter of this book, the following thick film techniques are of considerable technical interest in the development of thin film devices and are therefore described briefly in the following sections.
Basically LPE involves the precipitation of a material from a cooling solution of the material in the melt of a suitable element, onto an underlying single-crystal substrate. The solution and the substrate are kept apart, and contact is achieved either by "tipping" the furnace with the solution or by dipping the substrate into the solution in a ver...
The technology of screen printing offers a flexible, inexpensive method of preparation of pattern-delineated thick films for resistors, electrodes, and other components in circuits. Screen printing can also be used for deposition of compound semiconductor films for devices. The procedure for screen printing consists of dispersing a paste (called th...
Structural analysis involves the determination of the crystal structure, size and distribution of the grains, topographic details, and structural defects. Because of the strong interaction of electrons with atoms, the high electron-diffraction intensities provide the most sensitive and useful tool for the determination of the crystal structure of f...
With the increasing interest in the use of multilayered and multicom ponent material films for microdevices, microscopic analysis of composition, its depth profile and spatial distribution (called chemical mapping), and the chemical state of the atoms along with its depth profile are assuming enormous importance in the device technology area today....
- Kasturi Lal Chopra, Inderjeet Kaur
- 1983
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Oct 20, 2021 · PDF | Since its discovery in early times, thin films rapidly found industrial applications such as in decorative and optics purposes. With the evolution... | Find, read and cite all the...
- Edwin Acosta
Typically for different material: dh = ( 10 ~100) P ( T ) ( A / s ) dt. e. For deposition rate > 1 A/s: e > ~ 100 mtorr. Pe depends on: 1) materila and 2) temperature. Deposition rates are significantly different for different materials. Hard to deposit multi-component (alloy) film without losing stoichiometry.
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thin films deposition for forming layers below one micron, priority will be given to the two major deposition techniques used for thin films. The prominent subsets of deposition techniques are physical vapour deposition (PVD) and chemical vapour deposition (CVD). The distinguishing feature between PVD and CVD is in the vapour.
Handbook of Thin Film Technology. Book. © 2015. Download book PDF. Download book EPUB. Overview. Editors: Hartmut Frey, Hamid R. Khan. Serves as a practical handbook with a focus on the methods of thin film generation and measurement. Ideal for reference as well as for self-study.
Based on work by J. Thornton, D. Hoffman, Thin Solid Films, 171, 5-31 (1989). Most of the mechanisms discussed so far, involve densification of the film in one form or another. Therefore, they naturally lead to tensile stresses in deposited films. In sputtered films very large compressive stresses can be observed.
