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Axcelis Ion implantation systems, built on our next-gen Purion platform, delivers precision, purity, and productivity with the lowest cost of ownership.
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Axcelis Technologies, Inc. is an American company engaging in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide.
At Axcelis, we have a single goal: to help semiconductor manufacturers achieve the highest quality and yield, with the lowest cost of ownership. We deliver on that goal with ion implant platforms based on unique enabling technologies that provide unmatched purity, precision and productivity.
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Eterna ELS Ion Source is introduced. Improved design promises extended source life, low cost of operation and high reliability for Axcelis ion implanters; Axcelis ships 1000th GSD endstation; Industry standard for proven wafer-handling reliability, productivity
Tell us about your semiconductor fab challenges and let Axcelis show you how to improve precision, purity and productivity. The Investor Relations website contains information about Axcelis Technologies Inc's business for stockholders, potential investors, and financial analysts.
Purion ion implantation equipment delivers the highest purity, precision and productivity at the lowest cost of ownership. View the full Purion product line.
The Axcelis Purion XE Series is the industry standard for demanding high energy ion implantation, offering a wider energy range and greater reliability.
Accelerating Semiconductor Innovation | Axcelis Technologies, Inc. is a world-leading provider of equipment and services to the semiconductor manufacturing industry.
